Total area of Institute for Nanotechnology (INT) is about 4000 sq. meters:

Clean room

Consisting of 260 square meter total area, INT Cleanroom was divided into 5 main modules with different clean levels as below:

    * Lithography module – Class 1000
    * Service module – Class 100 000
    * Wet etching & cleaning module – Class 10 000
    * Characterization module – Class 10 000
    * Deposition & Dry etching module – Class 10 000

• Click here to view the floor plan of the facility in clean room

• Click here to view the full list of facilities available at INT